Tutorial 3: The Practice of Reactive Sputtering
This Society of Vacuum Coaters Tutorial, in cooperation with EFDS, will be presented by Bill Sproul, Reactive Sputtering, Inc., San Marcos (USA).
This tutorial will be held on Thursday, September 16, 2010, 09:25 - 13:00 and 15:15 - 18:55.
Click here for more information regarding the tutorial.
Topical Content
- Basics of reactive sputtering
- Flow control versus partial pressure control of the reactive gas
- Power supplies for reactive sputtering
- Reactive gas sensors
- Large area reactive sputtering
- Control systems for reactive sputtering
- Multiple gas reactive sputtering
- Reactive high power pulsed magnetron sputtering