• Advanced plasma and ion source technologies

- Pulsed plasmas
- HIPIMS
- Atmospheric plasma sources
- Ion implantation / Plasma immersion ion implantation
- New ion and plasma sources
- Industrial device technology

• Properties of technological plasmas

- Plasma diagnostics / process control
- Plasma modelling

• Plasma treatment and cleaning

- Plasma-surface interaction
- Plasma treatment of polymers
- Plasma sterilization and bio-functionalization
- Surface cleaning / plasma etching
- Ion and laser treatment

• PVD

- Magnetron sputtering
- Vacuum arc deposition
- Plasma-activated evaporation

• PECVD

- Low pressure plasma CVD
- Plasma polymerization
- Atmospheric pressure plasma CVD

• Plasma diffusion treatment

- Plasma nitriding / carburizing
- Hybrid and duplex processes

• Plasma spraying

• Ion-assisted deposition

- Ion beam deposition
- Ion beam sputtering

• Coating of special geometries

- Large area deposition
- Coating of inner walls and complex geometries (trenches, holes, ..)

• Nano films

- Ultrathin films
- Multilayer films
- Nanocomposite films
- Nanostructures and nanoparticles

• Protective and tribological coatings

- Tribological coatings
- Carbon-based films
- Corrosion-resistant coatings
- Barrier coatings

• Functional coatings

- Optical coatings
- Conductive and photocatalytic oxides
- Films for photovoltaics
- Films with special electrical functions
- Films with special magnetic functions
- Films for biomedical applications

- Structure and composition
- Geometrical characterization (thickness, roughness)
- Mechanical properties
- Internal stresses
- Optical properties
- Electric and magnetic properties
- Computer simulation and modelling of structure, stoichiometry and
growth